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September/October 1999

MEMS Mania: A Sampler

Company Goal Status
Analog Devices Micromachined accelerometers and actuators Commercial products
BF Goodrich Aerospace sensors Research
Caliper Technologies (1995 startup: Mountain View, CA) Lab-on-a-chip for microscopic fluid handling Commercial products
Cepheid (1996 startup; Sunnyvale, CA) Micro-chips for processing of DNA samples Commercial products
Goodyear Tire Intelligent tires that sense pressure Prototypes
Hewlett-Packard High-capacity data storage Research
Honeywell Polymer actuators capable of affecting macroscale objects Research
IBM Terabit data storage devices Research
Lucent Technologies Components for optical communications Prototypes
Rockwell Radio frequency switches for communication systems Research
Seagate Technology Optical-based data storage devices Prototypes
Texas Instruments Digital projection systems Commercial
TRW, Caltech Digital propulsion for micro-satellites Flight-ready Prototypes
Xerox PARC Microscopic controls for macroscopic systems Research
Silicon Light Machine (1994 startup; Sunnyvale, CA) High-resolution displays Product development
Leading MEMS projects by industrial groups in the United States. Source: Company reports and Defense Advanced Research Projects Agency (DARPA).


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