Sensors and Actuators A: Physical

Volume (issue): 80 (2) 2000

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Comparative study of novel micromachined accelerometers employing MIDOS 91 -- 99
O. Bochobza-Degani, D.J. Seter, E. Socher, Y. Nemirovsky
VLSI-NEMS chip for parallel AFM data storage 100 -- 107
M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, P. Vettiger
The realization and design considerations of a flip-chip integrated MEMS tunable capacitor 108 -- 118
Kevin F. Harsh, Bingzhi Su, Wenge Zhang, Victor M. Bright, Y.C. Lee
A electrostatic micromechanical switch for logic operation in multichip modules on Si 119 -- 125
Akihiko Hirata, Katsuyuki Machida, Hakaru Kyuragi, Masahiko Maeda
Fabrication of micro IC probe for LSI testing 126 -- 131
Ito Takahiro, Renshi Sawada, Eiji Higurashi
Prototype microrobots for micro-positioning and micro-unmanned vehicles 132 -- 137
Paul E. Kladitis, Victor M. Bright
Light-emitting devices using micromachined Si-tip mirror arrays 138 -- 142
Yun-Hi Lee, Sang-Jo Lee, Byeong-Kwon Ju, Myung-Hwan Oh
Digital MicroPropulsion (774k PDF) 143 -- 154
David H., Jr. Lewis, Siegfried W. Janson, Ronald B. Cohen, Erik K. Antonsson
An integrated MEMS three-dimensional tactile sensor with large force range 155 -- 162
Tao Mei, Wen J. Li, Yu Ge, Yong Chen, Lin Ni, Ming Ho Chan
Microfabrication of miniature aperture at the apex of SiO2 tip on silicon cantilever for near-field scanning optical microscopy 163 -- 169
Phan Ngoc Minh, Takahito Ono, Masayoshi Esashi
A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes 170 -- 178
Yoichi Mochida, Masaya Tamura, Kuniki Ohwada
Differences in anisotropic etching properties of KOH and TMAH solutions 179 -- 188
Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro, Daisuke Uchikawa
Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions 189 -- 196
Remco Wiegerink, Robert Zwijze, Gijs Krijnen, Theo Lammerink, Miko Elwenspoek

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