Initiator:20 x 400 ?m Resistor

Polysilicon resistor/heater: 20 x 400 ?m, 0.5 ?m thick, 210 Ohms.

Glows red at 30 Volts. Vaporizes at 60-100 Volts.

3 ?m SiO2

Polysilicon 0.5 ?m thick

Gold 0.5

?m thick

46

29

41

22

32

20

29

41

180

46

180

100

120

188

SILICON SUBSTRATE

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