Burst Diaphragms

Alignment holes

3 x 5 Thruster array

Single die

• 400 ?m thick silicon wafer

• 0.5 ?m thick silicon nitride (both sides; from MCNC)

• Laser-patterned on top surface

• KOH etched down to bottom silicon nitride layer

• 190, 290, and 390 ?m square diaphragms

Previous slide

Next slide

Back to first slide

View graphic version