MEMS Microthruster Digital Propulsion System

9/22/98


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Table of Contents

MEMS Microthruster Digital Propulsion System

MEMS Technologies Support Future Space Systems

Exploded View of Digital Microthruster Array

Top View of Phase 1 Thruster Stack

Assembled Phase 1 “Thruster Chip”

Fabrication Issues

Fabrication Issues

Laser Exposure of Glass Spacer Dice

20 x 400 Resistor

High Speed Video Images of Polysilicon Resistor Firing

Thrust Stand

Videotapes

Summary

Digital Propulsion Concept is Refined Through Three Hardware Builds

Home Page: http://www.design.caltech.edu/micropropulsion

Copyright © California Institute of Technology, 1998, 1999