MEMS Microthruster Digital Propulsion System
MEMS Technologies Support Future Space Systems
Exploded View of Digital Microthruster Array
Top View of Phase 1 Thruster Stack
Assembled Phase 1 “Thruster Chip”
Fabrication Issues
Laser Exposure of Glass Spacer Dice
20 x 400 Resistor
High Speed Video Images of Polysilicon Resistor Firing
Thrust Stand
Videotapes
Summary
Digital Propulsion Concept is Refined Through Three Hardware Builds
Home Page: http://www.design.caltech.edu/micropropulsion
Copyright © California Institute of Technology, 1998, 1999