% rates data file
% this is a comment
%
% Format usage:
%
% RATE:etch rate value
% PLANE:{ miller index for this plane }
%
% note the 100 wafer is rotated 45 degrees from the crystal frame
% e.g. the {1,1,1} plane is at zero degrees on the display
% 
% The etch rate data listed here are one experimental data for 
% EDP type S @ 100 Celcius
% The units of the etch rate is micron/hour
%
% The data source: Seidel, J. Electrochem Soc. Vol137, No 11 Nov 90 p. 3612
%


RATE: 1
PLANE: {1,1,1}
PLANE: {1,-1,1}
PLANE: {-1,1,1}
PLANE: {-1,-1,1}

PLANE: {1,1,-1}
PLANE: {1,-1,-1}
PLANE: {-1,1,-1}
PLANE: {-1,-1,-1}

RATE: 18
PLANE: {1,0,1}
PLANE: {-1,0,1}
PLANE: {0,1,1}
PLANE: {0,-1,1}

PLANE: {1,0,-1}
PLANE: {-1,0,-1}
PLANE: {0,1,-1}
PLANE: {0,-1,-1}

PLANE: {1,1,0}
PLANE: {-1,1,0}
PLANE: {1,-1,0}
PLANE: {-1,-1,0}

RATE: 24
PLANE: {1,0,0}
PLANE: {-1,0,0}
PLANE: {0,1,0}
PLANE: {0,-1,0}
PLANE: {0,0,1}
PLANE: {0,0,-1}


RATE: 30
PLANE: {3,1,1}
PLANE: {3,-1,1}
PLANE: {-3,1,1}
PLANE: {-3,-1,1}
PLANE: {1,3,1}
PLANE: {1,-3,1}
PLANE: {-1,3,1}
PLANE: {-1,-3,1}

PLANE: {3,1,-1}
PLANE: {3,-1,-1}
PLANE: {-3,1,-1}
PLANE: {-3,-1,-1}
PLANE: {1,3,-1}
PLANE: {1,-3,-1}
PLANE: {-1,3,-1}
PLANE: {-1,-3,-1}

PLANE: {1,1,3}
PLANE: {1,-1,3}
PLANE: {-1,1,3}
PLANE: {-1,-1,3}

PLANE: {1,1,-3}
PLANE: {1,-1,-3}
PLANE: {-1,1,-3}
PLANE: {-1,-1,-3}