NSF Sponsored Workshop on Structured Design Methods for MEMS

Fabrication Process Simulation Summary

Process simulation is the conversion of multiple two-dimensional layout geometries and process information into a three dimensional representation of the output shape. It is used to provide feedback in the design/fabrication loop before the full commitment to build a prototype is made. In the present state of MEMS technology it is used to reduce the number of trial and error physical fabrication iterations required to converge on the final design, masks and processes. In the future, it will also be used to guide the development of improved processes and to assess the sensitivity of the design to normal process variations. It can also play a role in developing design rules.

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