NSF Sponsored Workshop on Structured Design Methods for MEMS
Infrastructure Summary
- Finding: A national infrastructure for design and fabrication of
VLSI devices played a key role in building a VLSI community.
- Recommendation:
Create a national infrastructure for design and manufacture of MEMS,
including a set of standard MEMS processes
and a MEMS implementation service (MEMSIS),
so that a wider community of MEMS designers can be created.
- Finding: The rapid dissemination of MEMS design and fabrication
knowledge will primarily be achieved by the movement of students from
classrooms and university laboratories to commercial developers of MEMS.
This movement can be greatly facilitated by increasing the number of
students who are exposed to structured design methods for MEMS.
- Recommendation: Develop courses and curriculum materials for MEMS
design and fabrication.
Courses should be created specifically for faculty
members and an annual Workshop with participation of both industry and
academia to stimulate future research and facilitate keeping pace in
curriculum development with developments in the MEMS area.
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