NSF Sponsored Workshop on Structured Design Methods for MEMS
Function Simulation Summary
Simulation of the mechanical and electrical function of MEMS devices and
systems is intended to provide the designer with the ability to
insure that the design he submits for fabrication will meet the
function and performance requirements of the application.
The representation of the device occurs at many levels of abstraction and
it is important to be able to move between levels accurately and
to support top-down and bottom-up design.
Equally, a CAD framework for MEMS needs to support representation and
analysis in multiple energy domains (electrical, mechanical, thermal,
radiant, chemical, magnetic, acoustic and fluidic) with coupling between
each of these domains, the MEMS system must be represented so that function
can be verified at the desired level of abstraction. The design framework
required for MEMS is complex, but it is important to define the
framework properly so that design can be performed effectively and
accurately by novice and expert designer.
- Finding: A common language for representing MEMS functions
- Recommendation: Support the development of a theoretical framework
and tools for representation
and analysis of (multi-energy domain) MEMS functions,
and make the tools available to the design community.
Some such tools, by analogy to VLSI, might be:
- Layout verification tools (design rule checkers, component
extractors, layout vs. netlist comparers, etc.)
- Hierarchical schematic description and editing
- Multidomain simulators
- Circuit level simulators (Spice-like equations with parameter
- MEMS specific solid modelers capable of being manipulated to
provide object descriptions suitable for transmission to the
- Hardware behavioral modeling language (similar to VHDL-A?)
- Finding: Similar to VLSI, libraries of MEMS functional
(sub-)elements appears likely to facilitate development of complex
- Recommendation: Establish a framework for libraries of previously
successful MEMS devices and elements.
Previous: Synthesis Summary
Next: Digital Data Interchange Languages Summary
Return to NSF MEMS Design Workshop Index