NSF Sponsored Workshop on Structured Design Methods for MEMS

Function Simulation Summary


Simulation of the mechanical and electrical function of MEMS devices and systems is intended to provide the designer with the ability to insure that the design he submits for fabrication will meet the function and performance requirements of the application. The representation of the device occurs at many levels of abstraction and it is important to be able to move between levels accurately and unambiguously to support top-down and bottom-up design.

Equally, a CAD framework for MEMS needs to support representation and analysis in multiple energy domains (electrical, mechanical, thermal, radiant, chemical, magnetic, acoustic and fluidic) with coupling between them. In each of these domains, the MEMS system must be represented so that function can be verified at the desired level of abstraction. The design framework required for MEMS is complex, but it is important to define the framework properly so that design can be performed effectively and accurately by novice and expert designer.


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