NSF Sponsored Workshop on Structured Design Methods for MEMS

Summary Findings and Recommendations

This section presents a summary of the findings and recommendations of each of the workshop discussion groups. While each of the groups addressed a different topic, the findings and recommendations contained some striking commonalities. Nearly every group included recommendations to encourage and support research into:

Thus it appears that these three areas may form the core of structured design methods for MEMS.

However, the reports (perhaps properly, at this early stage of development) do not contain any specifics on the information that will be interchanged by the languages, stored in the libraries, or analyzed across multiple energy domains. Therefore, a top-level issue remains to be clarified, namely: what information should be used to represent the MEMS designs (either designs in progress, or completed devices). Should it be the attributes of the final desired device (e.g., 3-D shape and materials), or should it be the layout of the masks and other processing information to create the desired final (3-D) shape? Should it be function or structure?

Developing Structured Design Methods for MEMS holds the promise to significantly reduce the costs and time to create new devices and systems, and increase the complexity and robustness of devices and systems that can be designed.

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