NSF Sponsored Workshop on Structured Design Methods for MEMS

References


NSF:94
New Paradigms for Manufacturing. Workshop Report NSF 94-123, National Science Foundation, Computer and Information Science and Engineering Directorate, Microelectronics Information Processing Systems Division, Arlington, VA, May 1994. A. Mukherjee and J. Hilibrand, editors.
NSF:95
NSF Workshop on Design Methodologies for Solid Freeform Fabrication. Workshop report, National Science Foundation, Computer and Information Science and Engineering Directorate, Microelectronics Information Processing Systems Division, Engineering Design Research Center, Carnegie Mellon University, Pittsburgh, PA, June 5-6 1995. D. P. Siewiorek, editor.
NSF:88
Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics. Report of the NSF Workshop on Microelectromechanical Systems Research, National Science Foundation, Salt Lake city, UT, Hyannis MA, and Princeton, NJ, July 27, and November 12, 1987, and January 28-29, 1988. K. Gabriel, J. Jarvis and W. Trimmer, editors.
KEP:94
Bryzek, J., Petersen, K. E., and McCulley, W. Micromachines made of silicon. IEEE Spectrum 31, 5 (May 1994), 20--31.
CM:80a
Mead, C., and Conway, L. Introduction to VLSI Systems. Addison-Wesley Publishing Company, Reading, Massachusetts, 1980.
KEP:82
Petersen, K. E. Silicon as a mechanical material. Proceedings of the IEEE 79, 8 (May 1982), 420--457.

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