Structured Design Methods for MEMS
Final Report

A Workshop Sponsored by
the National Science Foundation

Directorate for Computer and Information Science and Engineering (CISE)
Division of Microelectronic Information Processing Systems (MIPS)

November 12-15, 1995
California Institute of Technology
Pasadena, CA

Erik K. Antonsson, editor
Associate Professor of Mechanical Engineering
Engineering Design Research Laboratory
Division of Engineering and Applied Science
California Institute of Technology
Mail Code 104-44, Caltech, Pasadena, CA 91125
FAX: 626/563-4963
October 15, 1996

FINAL Workshop Report (dated 15-October-1996):
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Workshop Final Report

October 15, 1996

The latest version of this report is available in HTML. PDF, and PostScript formats on the World Wide Web at:
http://www.design.caltech.edu/NSF_MEMS_Workshop
The opinions, findings, conclusions and recommendations expressed in this Report are those of the authors and do not necessarily reflect the view of the National Science Foundation. The U.S. government has certain rights in this material. However, the material is not copyrighted and any part of this report may be reproduced, in any form and by any means, for dissemination of the ideas, information and recommendations contained in this Report.

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